Description
Due to a problem in the Intel® Quartus® Prime Pro Edition Software version 21.4 and earlier, you might see this internal error during the Finalize stage of fitting. This problem only affects Intel Agilex® 7 devices.
Resolution
To work around this problem, disable post route physical synthesis optimizations by adding the following assignment to your Intel® Quartus® Settings File (.qsf):
set_global_assignment -name POST_ROUTE_PHYSICAL_SYNTHESIS OFF
This problem is scheduled to be fixed in a future release of the Intel® Quartus® Prime Pro Edition Software.